DocumentCode
1689423
Title
An image processing based measurement in automatic control of semiconductors´ crucible crystallization
Author
Nski, K. Budzy ; Falkowski, J.L.
Author_Institution
Inst. of Ind. Automatic Control, Warsaw Univ. of Technol., Poland
fYear
1992
Firstpage
495
Abstract
Preliminary results of research on vision based feedback for automatic control of crucible monocrystallization of semiconductors are presented. Image processing algorithms for measurement of chosen parameters in the crystallization zone are described. Basic tests of the system installed at its working place are reported
Keywords
computerised instrumentation; crystallisation; feedback; image processing; process computer control; algorithms; automatic control; computerised instrumentation; crucible monocrystallization; crystallization zone; feedback; image processing; process computer control; research; semiconductors; Automatic control; Crystalline materials; Crystallization; Feeds; Gallium arsenide; Humans; Image processing; Process control; Production; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Electronics, 1992., Proceedings of the IEEE International Symposium on
Conference_Location
Xian
Print_ISBN
0-7803-0042-4
Type
conf
DOI
10.1109/ISIE.1992.279649
Filename
279649
Link To Document