Title :
Mach Probe Measurement Of Flow Velocity In Rf Plasma
Author :
Yang, Jang Gyoo ; Chang, Hong Young
Author_Institution :
Korea Advanced Institute of Science
Keywords :
Distortion measurement; Electric variables measurement; Fluid flow measurement; Hafnium; Impedance; Physics; Plasma measurements; Probes; Radio frequency; Velocity measurement;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.589023
