Title :
Semi-insulating 6H-SIC Epitaxial Films
Author :
Mazzola, Michael S. ; Saddow, Stephen E.
Author_Institution :
Mississippi State University
Keywords :
Chemical technology; Chemical vapor deposition; Crystalline materials; Epitaxial growth; Laboratories; Microwave oscillators; Photoconducting materials; Plasma accelerators; Semiconductor materials; Silicon carbide;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.589058
