Title :
MIM-based ISFET sensors with CLOSED/OPEN Sense Plates for pH detection
Author :
Molina, J. ; Espinosa, G. ; Torres, A. ; Sanz, M.T. ; Guerrero, E. ; Perez, B. ; Fernandez, J. ; McKenna, J. ; Hoque, M. ; Chen, W. ; McNelly, T. ; de Souza, R. ; Parris, P.
Author_Institution :
Electron. Dept., INAOE, Puebla, Mexico
Abstract :
We present electrochemical measurements obtained from chemical sensors that integrate conventional MOSFET devices along with SENSE/RE plates based on MIM (Metal-Insulator-Metal) structures that are all-integrated to the gate oxide of transistors using standard 0.18 μm CMOS fabrication processing. Depending on the CMOS-based materials used as sensing plates for pH detection, different sensitivities to hydrogen ion activities are found and they are all related to the bias conditions of the sensor structure.
Keywords :
CMOS integrated circuits; MIM devices; MOSFET; electrochemical sensors; ion sensitive field effect transistors; pH measurement; CMOS fabrication processing; CMOS-based material; MIM structure; MIM-based ISFET sensor; MOSFET device; SENSE-RE plate; chemical sensor structure; closed-open sense plate; electrochemical measurement; gate oxide; hydrogen ion activity; metal-insulator-metal structure; pH detection; transistors; Chemical sensors; Logic gates; MIM capacitors; MOSFET circuits; Metals; Sensitivity; Sensors;
Conference_Titel :
Circuits and Systems (LASCAS), 2012 IEEE Third Latin American Symposium on
Conference_Location :
Playa del Carmen
Print_ISBN :
978-1-4673-1207-3
DOI :
10.1109/LASCAS.2012.6180308
