DocumentCode
1691844
Title
Chalcogenide glassy-based photoresists for microelectronics
Author
Tsiulyanu, D.I.
Author_Institution
Dept. of Phys., Tech. Univ., Kishinau, Moldova
Volume
1
fYear
1995
Firstpage
31
Abstract
Possibilities of application in microelectronics of chalcogenide glassy semiconductors (ChGS) as inorganic high-resolution photoresists is treated. A brief consideration of three main effects: photostructural transformations, photo-doping and electrostimulated interaction of ChGS with some metals for lithography is given. The emphasis is put on the third effect which appears to be original and less known as well as on the technical features of lithography processes with ChGS
Keywords
chalcogenide glasses; integrated circuit technology; photochromism; photoresists; chalcogenide glassy semiconductors; electrostimulated interaction; inorganic high-resolution photoresists; microelectronics; photo-doping; photodarkening; photolithography; photostructural transformations; Chemicals; Etching; Glass; Lithography; Microelectronics; Optical films; Optical sensors; Photochromism; Resists; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Conference_Location
Nis
Print_ISBN
0-7803-2786-1
Type
conf
DOI
10.1109/ICMEL.1995.500829
Filename
500829
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