A 0.67nJ/S time-domain temperature sensor for low power on-chip thermal management

This paper presents a time-domain temperature sensor with process variation tolerance for low power on-chip thermal management. To achieve a suitable on-chip composition, the proposed sensor uses the externally applied code to save the area- and power-consumption. The proposed sensor is implemented using a 0.13μm CMOS process technology and its core area is 0.031mm². The measurement results show that the energy per conversion rate is 0.67nJ/S at 1.2V supply voltage, conversion rate is 430k samples/sec, and sensing error is -0.63 ~ +1.04°C with 2^nd order master curve and one-point calibration over the temperature range of 20 ~ 120°C.