Information acquisition of a micro/nano displacement for piezoelectric actuator sensor based on DSP2812

A novel micro/nano displacement based on multi-stage expansion mechanism is presented. It combines the accuracy mechanism technology and real-time fine electronic technology. The paper focuses on from the working principle electronic information acquisition, hardware design to signal processing as well as the characteristic experiment and so on. Micro/nano displacement was detected using four strain resistances pasted on elastomer which links to flexible hinges. It can obtain the displacement after mechanical expansion. After that, the signal needs electronic amplification, low-pass filter to get amplified useful signal from polluted weak signal, then send to AD977A for conversion from analog to digital. Then the data were sent to DSP2812 which handles the signal processing using FIR filer, besides, data can display and communicate with the upper PC. In the end, some correlative experiments have been made, the experiment data show that the sensor can perceive the displacement of the PZT actuator in micro/nano scale, also the circuit hardware system can enhance the signal´s static output real-time, higher linearity and resolution.