Title :
Sensor microsystems
Author_Institution :
Swiss Federal Inst. of Technol., Lausanne, Switzerland
Abstract :
This is a review of the field of sensor microsystems from the systems approach point of view. The following three basic synergetic relationships between the components of a microsystem are identified: compensation, feedback, and chopping. Some selected examples of the application of these principles in sensor microsystems are discussed. The choice of the integration technology for the realization of a sensor microsystem depends strongly on the involved market size. The larger the market, the more fundamental integration technology should be applied
Keywords :
compensation; feedback; integrated circuit technology; microsensors; chopping; compensation; feedback; integration technology; market size; sensor microsystems; systems approach; Circuits; Consumer electronics; Electronics packaging; Feedback; Intelligent sensors; Magnetic sensors; Microelectronics; Microsensors; Sensor systems; Signal processing;
Conference_Titel :
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-2786-1
DOI :
10.1109/ICMEL.1995.500923