Title :
Production of sensors for different physical parameters on the base of all-purpose and unified technology
Author_Institution :
Inst. of Semicond. Phys., Nat. Academy of Sci., Kiev
Abstract :
The Ge films grown on semiinsulating GaAs substrates may be used as universal sensitive material for manufacturing of various sensors of different physical parameters such as temperature, magnetic field, strain, pressure and light flux. The technology of manufacturing such sensors is an all-purpose one
Keywords :
III-V semiconductors; characteristics measurement; electric sensing devices; elemental semiconductors; gallium arsenide; germanium; semiconductor heterojunctions; semiconductor thin films; GaAs; Ge-GaAs; manufacturing technology; physical parameters; sensors; universal sensitive material; Absorption; Cryogenics; Electric variables measurement; Electromagnetic measurements; Liquid crystals; Optical fiber sensors; Optical fibers; Optical sensors; Temperature measurement; Temperature sensors;
Conference_Titel :
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-2786-1
DOI :
10.1109/ICMEL.1995.500925
