Title :
Production of Sensors for Different Physical Parameters on the Base of All-Pupose and Unified Techno
Author :
Mitin, V.F. ; Tkhorik, Yu.A.
Keywords :
Capacitive sensors; Gallium arsenide; Magnetic field induced strain; Magnetic field measurement; Magnetic materials; Magnetic sensors; Production; Sensor phenomena and characterization; Temperature distribution; Temperature sensors;
Conference_Titel :
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Print_ISBN :
0-7803-2786-1
DOI :
10.1109/ICMEL.1995.500926
