• DocumentCode
    1694220
  • Title

    Electronic model a thin film gas sensor (TFGS) based on SnO2

  • Author

    Brynzari, V.I. ; Dmitriev, S.V. ; Korotchenkov, G.S.

  • Author_Institution
    Lab. of Microelectron., Tech. Univ. of Moldova, Chisinau, Moldova
  • Volume
    2
  • fYear
    1995
  • Firstpage
    585
  • Abstract
    An electronic model of a CO gas sensor, based on a SnO2 thin film was proposed. This model was based on the analysis of the balance equation of the number of chemisorbed gas particles which are responsible for the surface potential modulation. Experimental results, which confirm the reality of this model were given too
  • Keywords
    carbon compounds; chemisorption; gas sensors; semiconductor device models; surface potential; thin film devices; tin compounds; CO; SnO2; balance equation; chemisorbed gas particles; electronic model; surface potential; thin film gas sensor; Ceramics; Chemical technology; Conductivity; Electrons; Equations; Filling; Gas detectors; Microelectronics; Thick film sensors; Thin film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 1995. Proceedings., 1995 20th International Conference on
  • Conference_Location
    Nis
  • Print_ISBN
    0-7803-2786-1
  • Type

    conf

  • DOI
    10.1109/ICMEL.1995.500932
  • Filename
    500932
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1694220