Title :
Manufacturing peculiarities of the SnO2 thin film gas sensors (TFGS)
Author :
Dmitriev, S.V. ; Korotchenkov, G.S. ; Brynzari, V.I. ; Necsoiu, T.
Author_Institution :
Lab. of Microelectron., Tech. Univ. of Moldova, Chisinau, Moldova
Abstract :
This report presents the results of research aimed at the TFGS elaboration. The main purpose of research was to elaborate TFGS technology and topology, which ensures the cost reduction and maximum agreement with possibilities of planar technology used in semiconductor manufacturing
Keywords :
gas sensors; semiconductor device manufacture; semiconductor materials; semiconductor thin films; tin compounds; SnO2; TFGS technology; cost reduction; planar technology; semiconductor manufacturing; sensor topology; thin film gas sensors; Building materials; Costs; Dielectric substrates; Gas detectors; Manufacturing; Microelectronics; Semiconductor device manufacture; Temperature sensors; Thin film sensors; Topology;
Conference_Titel :
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-2786-1
DOI :
10.1109/ICMEL.1995.500933
