DocumentCode
169434
Title
Screen printed flexible pressure sensors skin
Author
Khan, Sharifullah ; Lorenzelli, Leandro ; Dahiya, Ravinder S.
Author_Institution
Univ. of Trento, Trento, Italy
fYear
2014
fDate
19-21 May 2014
Firstpage
219
Lastpage
224
Abstract
This paper presents all screen printed flexible pressure sensors arrays with Polyvinylidene Fluoride-Trifluoroethylene P(VDF-TrFE) sandwiched between patterned metal layers. Whilst bottom electrodes and P(VDF-TrFE) are printed on a 25 μm thick polyamide (PI) substrate, the top electrodes with force concentrator posts on backside are printed on a separate polyethylene terephthalate (PET) substrate and the two are then adhered with good alignment. Each sensor module consists of 4×4 sensors array, with each sensor having 1×1 mm2 sensitive area, and interconnection lines for expandability of the cells. Capacitance-voltage analysis at varying frequency and piezoelectric response of the sensor is presented. Whole package of foldable pressure sensor realized is completely developed by screen printing technology and is targeted towards realizing low-cost electronic skin. The sensors arrays have also been compared with similar sensors structures that were realized with spin coating.
Keywords
electrodes; flexible electronics; integrated circuit interconnections; pressure sensors; sensor arrays; spin coating; thick films; P(VDF-TrFE); PETsubstrate; PI substrate; bottom electrodes; capacitance-voltage analysis; foldable pressure sensor; interconnection lines; low-cost electronic skin; patterned metal layers; piezoelectric response; polyamide substrate; polyethylene terephthalate substrate; polyvinylidene fluoride-trifluoroethylene; screen printed flexible pressure sensors skin; screen printing technology; sensor array; size 1 mm; size 25 mum; spin coating; varying frequency; Electrodes; Force; Humidity; Printing; Sensor arrays; Substrates; Flexible Sensors; Piezoelectric; Polyvinylidene Fluoroethylene (PVDF-TrFE); Screen Printing; Spin Coating;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
Conference_Location
Saratoga Springs, NY
Type
conf
DOI
10.1109/ASMC.2014.6847002
Filename
6847002
Link To Document