• DocumentCode
    169437
  • Title

    Surface metal contamination on tool components - A case study for evaluating acid extraction ICP-MS measurement process

  • Author

    Shi Liu ; Bin Liu

  • Author_Institution
    ChemTrace Anal. Service, Fremont, CA, USA
  • fYear
    2014
  • fDate
    19-21 May 2014
  • Firstpage
    236
  • Lastpage
    241
  • Abstract
    Measurement system analyses were conducted for acid extraction ICP-MS analysis for trace metal contaminations on the surface of ceramic test coupons. The results revealed that a casually designed Gage R&R study neglecting the nonreplicable nature of the analytical process could lead to erroneous conclusions, e.g. combined Gage R&R consumed 84% of Ca tolerance, which was much inflated by the inherent part-to-part variations. With necessary adjustments to the experimental design and data processing, accurate evaluation could be achieved and the consumption of Ca tolerance was actually 15%. This work proved that careful considerations must be given to the conditions and boundaries of the measurement system analysis in order to avoid pitfalls and to attain accurate results so variation sources and improvement opportunities of the manufacturing processes could be correctly identified.
  • Keywords
    calcium; mass spectroscopy; semiconductor device manufacture; surface contamination; Ca; Ca tolerance; Gage R&R; ICP-MS measurement process; acid extraction; ceramic test coupons; manufacturing processes; measurement system analyses; surface metal contamination; tool components; trace metal contaminations; Ceramics; Contamination; Measurement uncertainty; Metals; Pollution measurement; Semiconductor device measurement; Surface treatment; Gage R&R; ICP-MS; measurement system analysis; micro contamination; trace metal;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
  • Conference_Location
    Saratoga Springs, NY
  • Type

    conf

  • DOI
    10.1109/ASMC.2014.6847005
  • Filename
    6847005