Title :
Using in-line film measurement as a proxy for device matching to speed up process change qualification
Author :
Chienfan Yu ; Van Roijen, R. ; Shah, Shalin ; Woodard, Eric ; Ayala, Javier ; Sziklas, Edward
Author_Institution :
IBM Syst. & Technol. Group, Hopewell Junction, NY, USA
Abstract :
We describe two cases where we were able to use in-line macro measurement data to pre-select processes and to do necessary adjustments to prospect matching devices for process qualification. This approach dramatically shortens the time for new process qualification.
Keywords :
nanotechnology; semiconductor device manufacture; device matching; in-line film measurement; in-line macro measurement data; process change qualification; Implants; Monitoring; Process control; Qualifications; Semiconductor device measurement; Strips; Time measurement; device matching; in-line measurements; process change qualification; screen oxide;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
Conference_Location :
Saratoga Springs, NY
DOI :
10.1109/ASMC.2014.6847007
