DocumentCode
1695751
Title
A Toroidal Ecr System For Thin Film Deposition
Author
Greig, W. ; Zhang, X. ; Baker, M. ; Gangopadhyay, S.
Author_Institution
Texas Tech University
fYear
1994
Firstpage
216
Lastpage
216
Keywords
Inductors; Plasma chemistry; Plasma density; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma sources; Plasma stability; Plasma temperature; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.589124
Filename
589124
Link To Document