Title :
Multi-variable Feedback Regulation Of Plasma Processing Reactors
Author_Institution :
JAYCOR
Keywords :
Control systems; Feedback; Inductors; Plasma applications; Plasma chemistry; Plasma density; Plasma materials processing; Plasma simulation; Plasma stability; Plasma temperature;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.589125
