DocumentCode

1695826

Title

Consequences Of Particulate Charging in RF Discharge Sheaths

Author

Winske, D. ; Jones, M.E.

Author_Institution

Los Alamos National Laboratory

fYear

1994

Firstpage

216

Lastpage

217

Keywords

Drag; Dusty plasma; Electrodes; Inductors; Plasma applications; Plasma density; Plasma devices; Plasma materials processing; Plasma temperature; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on

Conference_Location

Santa Fe, NM, USA

ISSN

0730-9244

Print_ISBN

0-7803-2006-9

Type

conf

DOI

10.1109/PLASMA.1994.589126

Filename

589126