Title :
Consequences Of Particulate Charging in RF Discharge Sheaths
Author :
Winske, D. ; Jones, M.E.
Author_Institution :
Los Alamos National Laboratory
Keywords :
Drag; Dusty plasma; Electrodes; Inductors; Plasma applications; Plasma density; Plasma devices; Plasma materials processing; Plasma temperature; Radio frequency;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.589126
