Title :
Micromechanical triaxial acceleration sensor for automotive applications
Author :
Reichenbach, R. ; Schubert, D. ; Gerlach, G.
Author_Institution :
Sensor-Technol.-Centre, Robert Bosch GmbH, Reutlingen, Germany
Abstract :
A micromechanical triaxial acceleration sensor for automotive applications has been realised that has all three axis integrated into one single transducer element. Prototypes of the sensor were fabricated using a standard Bosch surface micromachining process. The active electromechanical transducer element requires less than 1 mm/sup 2/ of chip area. Open-loop capacitive readout is used to evaluate the sensor, which operates in a three-mass-oscillator configuration. X, Y and Z-axis sensitivities of 0.55 fF/G, 0.4 fF/G and 0.99 fF/G have been achieved.
Keywords :
accelerometers; capacitive sensors; micromachining; microsensors; automotive applications; electromechanical transducer; micromechanical triaxial acceleration sensor; single transducer; standard Bosch surface micromachining; Acceleration; Accelerometers; Automotive applications; Automotive electronics; Capacitive sensors; Capacitors; Electrodes; Micromechanical devices; Springs; Transducers;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215257
