An integrated, vertical-drive, in-plane-sense microgyroscope

Author

Bhave, S.A. ; Seeger, J.I. ; Xuesong Jiang ; Boser, Bernhard E. ; Howe, R.T. ; Yasaitis, J.

Author_Institution

Berkeley Sensor & Actuator Center, Univ. of California, Berkeley, USA

Volume

1

fYear

2003

Firstpage

171

Abstract

This paper describes the principle of operation and experimental results of a Y-axis /spl Sigma//spl Delta/ force-feedback gyroscope. The gyroscope was fabricated in Analog Devices´ monolithic Modular-MEMS process with 6/spl mu/m thick structural polysilicon and 0.8/spl mu/m CMOS. The sensor utilizes vertical (Z-axis) actuation of the proof mass to enable in-plane (X-axis) differential sensing of the Coriolis force. Two orthogonally-oriented gyroscopes form a dual-axis rate sensor. The gyroscope achieves 8/spl deg//sec//spl radic/Hz noise floor, for operation at ambient pressure.

Keywords

CMOS integrated circuits; Coriolis force; elemental semiconductors; gyroscopes; microsensors; silicon; /spl Sigma//spl Delta/ force-feedback gyroscope; 0.8 micron; 6 micron; CMOS; Coriolis force; Si; analog devices; dual-axis rate sensor; inplane-sense microgyroscope; integrated microgyroscope; monolithic modular-MEMS process; noise floor; orthogonally-oriented gyroscope; proof mass actuation; structural polysilicon; vertical drive microgyroscope; Acceleration; Accelerometers; CMOS process; CMOS technology; Electrodes; Force feedback; Gyroscopes; Mechanical sensors; Oscillators; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215280

Filename

1215280