Title :
Three-dimensional nanostructure fabrication by focused-Ion-beam chemical vapor deposition
Author_Institution :
Himeji Inst. of Technol., Hyogo, Japan
Abstract :
Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga/sup +/ focused ion beam (FIB) assisted deposition using a hydrocarbon precursor (phenanthrene). Producing of three-dimensional nanostructure is discussed. Micro-coil and bellows with 0.1 /spl mu/m dimension were fabricated as parts of micro-system. Furthermore, microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 /spl mu/m external diameter and 12 /spl mu/m height.
Keywords :
chemical vapour deposition; micromechanical devices; nanostructured materials; nanotechnology; 0.1 micron; 12 micron; 2.75 micron; focused-ion-beam chemical vapor deposition; hydrocarbon precursor; microbeam technology; microcoil; microstructure plastic art; microsystem; microwine glass; phenanthrene; three-dimensional nanostructure fabrication; Chemical lasers; Chemical vapor deposition; Coils; Electrons; Hydrocarbons; Ion beams; Nanoscale devices; Optical device fabrication; Substrates; Surface emitting lasers;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215282
