Title :
An ejection microarray for in-situ oligonucleotide synthesis on DNA chips
Author :
Gue, A.-M. ; Phou, Ty. ; Jugieu, D. ; Conedera, V.
Author_Institution :
Lab. d´Anal. et d´Archit. des Syst., CNRS, Toulouse, France
Abstract :
A new microfluidic actuator for in situ oligonucleotides synthesis on DNA chips has been developed. It consists in a microarray of individually addressable ejectors able to deliver pl droplets. The working principle is based on thermal ink-jet printing. The design of the micro injector has been deduced from FEM simulation, in order to achieve 4000 ejectors/cm/sup 2/. The technological fabrication process includes the realisation of a thin dielectric and stress free membrane, of polysilicon heater resistors, and of SU8 photopolymerised nozzles. Ejections have been observed for 50 /spl mu/s pulses and 1.25 W power consumption without satellite droplets.
Keywords :
DNA; biomembranes; drops; elemental semiconductors; finite element analysis; microactuators; microfluidics; nozzles; resistors; silicon; 1.25 W; 50 mus; DNA chips; FEM simulation; Si; addressable ejectors; droplets; ejection microarray; fabrication process; microfluidic actuator; oligonucleotide synthesis; photopolymerised nozzles; polysilicon heater resistors; stress free membrane; thermal ink-jet printing; thin dielectric membrane; Actuators; Biomembranes; DNA; Dielectrics; Energy consumption; Fabrication; Ink jet printing; Microfluidics; Resistors; Thermal stresses;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215292
