Title :
Digital sound reconstruction using arrays of CMOS-MEMS microspeakers
Author :
Diamond, B.M. ; Neumann, J.J. ; Gabriel, K.J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
We report on the development of a direct digital method for producing sound using an array of CMOS-MEMS microspeakers. In a previous article we described the theory behind digital sound reconstruction, characterized the acoustic response of a single CMOS-MEMS membrane, and showed experimental results involving a 3-bit (7 speaker) array composed of individual microspeaker chips. In this work, we report on the design, fabrication, and operation of an 8-bit (255 speaker) array integrated on a single chip. With this new device, we have been able to further study sound reconstruction and understand the sources of harmonic distortion and waveform quality that are essential to creating a complete digital sound system.
Keywords :
CMOS integrated circuits; harmonic distortion; loudspeakers; membranes; micromechanical devices; signal reconstruction; waveform analysis; CMOS-MEMS microspeakers; acoustic response; digital sound reconstruction; harmonic distortion; membrane; microspeaker chips; single chip; waveform quality; Acoustic arrays; Acoustic pulses; Biomembranes; Fabrication; Frequency; Linearity; Loudspeakers; Micromechanical devices; Transducers; Voltage;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215297
