Title :
Micro-finger articulation by pneumatic parylene balloons
Author :
Lu, Y. ; Chang-Jin Kim
Author_Institution :
Dept. of Mech. Aerosp. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Articulated micro-fingers have been developed as an important building block to construct micro-robotic end-effectors such as a micro-hand. This micro-finger features robust finger segments made from bulk silicon, pneumatically driven balloon joints made of Parylene thin film, and monolithic integration to minimize leakage. We present the device concept, joint mechanism, and fabrication processes, as well as test results. For the current specification, each finger is measured to exert over 0.15 mN at 120 psi.
Keywords :
elemental semiconductors; microactuators; microrobots; monolithic integrated circuits; nickel; pneumatic actuators; scanning electron microscopy; semiconductor thin films; silicon; xenon compounds; Parylene thin film; Si-XeF/sub 2/-Ni; microfinger articulation; microrobotic end effectors; monolithic integration; pneumatic parylene balloons; silicon; Biomembranes; Fingers; Force control; Grasping; Grippers; Micromechanical devices; Pressure control; Rubber; Silicon; Springs;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215306
