Title :
Integrated micro chamber for living cell analysis with negligible dead volume sample injector
Author :
Kanai, M. ; Abe, H. ; Munaka, T. ; Fujiyama, Y. ; Uchida, D. ; Yamayoshi, A. ; Nakanishi, H. ; Murakami, Akira ; Shoji, S.
Author_Institution :
Technol. Res. Lab., Shimadzu Corp., Tokyo, Japan
Abstract :
We develop the micro chamber for real-time monitoring of living cell. It is integrated with an extremely low dead volume sample injector. The chamber was fabricated by the combination of isotropic etching and deep trench etching using CCP-RIE and ICP-RIE. The reproducible sample injection of the order of 1 nL is performed. Biological cell culture of HeLa is also demonstrated in a prototype device.
Keywords :
biomolecular electronics; cellular biophysics; chemical analysis; integrated circuit technology; living systems; sputter etching; RIE; biological cell; deep trench etching; integrated microchamber; isotropic etching; living cell analysis; low dead volume sample injector; prototype device; real-time monitoring; Biological cells; Bonding; Etching; Filters; Laboratories; Monitoring; Polymers; Prototypes; System-on-a-chip; Valves;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215309
