Title :
Free-free beam silicon carbide nanomechanical resonators
Author :
Huang, X.M.H. ; Prakash, M.K. ; Zorman, C.A. ; Mehregany, M. ; Roukers, M.L.
Author_Institution :
Condensed Matter Phys., California Inst. of Technol., Pasadena, CA, USA
Abstract :
A free-free beam silicon carbide nanomechanical resonator has been co-fabricated on the same chip with a doubly-clamped beam resonator operating at similar frequencies. Device testing has been performed to directly compare their properties. A significant improvement in quality factor is observed for the free-free beam design.
Keywords :
Q-factor; micromechanical resonators; nanoelectronics; silicon compounds; wide band gap semiconductors; NEMS; SiC; cofabrication; device testing; doubly-clamped beam resonator; free-free beam design; free-free beam silicon carbide nanomechanical resonator; quality factor; Acoustic beams; Etching; Frequency; Lithography; Optical attenuators; Optical films; Optical resonators; Q factor; Resonance; Silicon carbide;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215323
