Title :
Reliability evaluations of chip interconnect in lead-free solder systems
Author :
Guo, Yifan ; Lin, Jong-Kai ; De Silva, Anada
Author_Institution :
Final Manuf. Technol. Center, Motorola Inc., Tempe, AZ, USA
fDate :
6/24/1905 12:00:00 AM
Abstract :
Chip interconnect (solder to silicon) reliability is one of the critical elements in the qualification of flip-chip bumping technology. Since the interconnect materials, structures and processes vary in different bumping technologies, the strength and reliability must be evaluated for each design. As lead-free solders are used in the system, the intermetallics associated with the lead-free solders and the UBM (under bump metallurgy) has also influence on the interconnect reliability. In addition, the stress that an interconnect experiences during thermal cycling depends on the properties of the solder alloy used in the interconnect. Different solder alloys require different interconnect strengths to achieve good reliability in thermal cycling. This paper reports on a study of interconnect reliability by comparing the interconnect strength and the working stress in the interconnect during qualification and application. A simple stress model was developed to determine the interconnect stress during thermal cycling. A testing methodology was established for determining the interconnect strength. In this report, the reliability of several interconnect structures in several lead-free solder systems, including Sn/Ag, Sn/Ag/Cu and Sn/Cu solders and the Ni-Au and TiW-Cu UBMs were studied.
Keywords :
chip scale packaging; copper alloys; failure analysis; flip-chip devices; integrated circuit bonding; integrated circuit interconnections; integrated circuit packaging; integrated circuit reliability; integrated circuit testing; reflow soldering; silver alloys; thermal stresses; tin alloys; Ni-Au; Ni-Au UBM; Pb-free solder; SnAg; SnAg solders; SnAgCu; SnAgCu solders; SnCu; SnCu solders; TiW-Cu; TiW-Cu UBM; UBM; chip interconnect reliability; flip-chip bumping technology; interconnect materials; interconnect processes; interconnect qualification; interconnect reliability; interconnect strength; interconnect structures; interconnect working stress; lead-free solder intermetallics; lead-free solder systems; solder alloy properties; solder to silicon chip interconnects; thermal cycling stress model; under bump metallurgy; Environmentally friendly manufacturing techniques; Inorganic materials; Intermetallic; Lead; Qualifications; Semiconductor device manufacture; Silicon; System testing; Tensile stress; Thermal stresses;
Conference_Titel :
Electronic Components and Technology Conference, 2002. Proceedings. 52nd
Print_ISBN :
0-7803-7430-4
DOI :
10.1109/ECTC.2002.1008270