Integrated microinstrumentation systems: smart peripherals for distributed sensing and control

The diagram of a typical microinstrumentation system is shown. With software-based digital compensation, the individual precision trimming of each front-end analog circuit block is replaced with a single end-to-end characterization of the chain, lowering overall system cost and changing circuit requirements. A monolithic mass flowmeter front-end containing sensors for flow rate, direction, gas type, pressure, and temperature is shown. Also shown is a micromachined 16-channel CMOS probe for the study of biological neural nets and for use in neural prostheses. In addition, a multielement gas analyzer front-end, consisting of two dual element gas detectors and an interface chip that controls the temperatures of ultrathin gas-sensitive metal films from ambient to over 1000 degrees C, is shown.<>