Title :
In-channel micromechanical plate interacting with fluid flow
Author :
Czaplewski, D.A. ; Ilic, B. ; Zalalutdinov, M. ; Olbricht, W.L. ; Zehnder, Alan T. ; Craighead, H.G. ; Michalske, T.A.
Author_Institution :
Dept. of Appl. Phys., Cornell Univ., Ithaca, NY, USA
Abstract :
We have studied the interaction of fluid with a suspended micromechanical plate encapsulated in a fluidic channel. Fluid flowed into the channel at a flow rate of 4.2 microliters/minute and the deformation of the plate observed using optical deflection means. The flow was modeled as Hagen-Poiseuille flow and the forces on the plate were calculated from the steady state solution for incompressible and isothermal flow in a square duct. FEM simulations of the plate predict an angular deflection of 2/spl times/10/sup -5/ radians while the observed deflection of the plate was 2.3/spl times/10/sup -4/ radians.
Keywords :
Poiseuille flow; channel flow; deformation; flow simulation; microfluidics; pipe flow; FEM simulations; Hagen-Poiseuille flow; deformation; fluid flow; fluidic channel; micromechanical plate; optical deflection; Ducts; Fluid flow; Isothermal processes; Microfluidics; Micromechanical devices; Physics; Silicon; Steady-state; Stress; Viscosity;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215336
