Title :
A MEMS-based microsensor to measure all six components of force and moment on a near-wall particle in turbulent flow
Author :
Dao, D.V. ; Toriyama, T. ; Sugiyama, S. ; Nguyen, An T. ; Wells, J.C.
Author_Institution :
Ritsumeikan Univ., Shiga, Japan
Abstract :
This paper presents the development of a six-degree of freedom (6-DOF) force moment sensor utilizing the piezoresistive effects in silicon. The proposed sensor can independently detect six components of force and moment on a test particle in a turbulent flow. By combining p-type conventional and shear piezoresistors in Si (111), and arranging them suitably on the sensing area, the total number of piezoresistors used in this sensing chip is only eighteen, much fewer than that of the prior art piezoresistive 6-DOF force sensors. Calibration for six components of force versus output voltages was completed. The sensitivities are linear, close to the design values. Preliminary results of measurement of forces and moments acting on a test particle in turbulent flow will be presented.
Keywords :
channel flow; elemental semiconductors; microsensors; piezoresistive devices; silicon; turbulence; MEMS-based microsensor; Si; degree of freedom; force moment sensor; near-wall particle; piezoresistive effects; sensing chip; shear piezoresistors; silicon; turbulent flow; Art; Calibration; Force measurement; Force sensors; Microsensors; Particle measurements; Piezoresistance; Piezoresistive devices; Silicon; Testing;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215364
