Title :
Limiting current type oxygen sensor with graded-composition layer electrode
Author :
Suzuki, T. ; Iio, M. ; Okuno, T. ; Ogino, K. ; Ishiguro, Y. ; Kondo, M. ; Takahashi, H. ; Inaba, T. ; Kondo, H. ; Saji, K.
Author_Institution :
Gas Equipment Dev. Div., Yazaki Meter Co. Ltd., Shizuoka, Japan
Abstract :
Limiting current type oxygen sensors using a thin-film zirconia electrolyte and platinum electrodes have been reported previously. However, for this configuration, in which the electrolyte resistance is minimized, the sensor performance may be dominated by the electrode interface resistance. Accordingly, an improved sensor with graded-composition layer electrodes (GLE) has been developed to reduce the electrode interface resistance in such a device. Sensors fabricated with GLE displayed good linearity and high stability to oxygen concentrations from 0% to 100%, due to a decrease in the electrode interface resistance.
Keywords :
gas sensors; oxygen; platinum; sputtered coatings; thin films; O/sub 2/; Pt-ZrO/sub 2/-Y/sub 2/O/sub 3/; electrode interface resistance; graded-composition layer electrode; graded-composition layer electrodes; oxygen concentrations; oxygen sensor; platinum electrodes; sensors fabrication; thin-film zirconia electrolyte; Anodes; Cathodes; Electrodes; Gas detectors; Immune system; Oxygen; Platinum; Sensor phenomena and characterization; Sputtering; Thin film sensors;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215367