Title :
Thin film micro carbon oxide sensor using MEMS process
Author :
Yeung-Il Bang ; Kap-Duk Song ; Jeung-Soo Huh ; Soon-Don oi ; Duk-Dong Lee
Author_Institution :
Sch. of Electron. & Electr. Eng., Kyungpook Nat. iv., Daegu, South Korea
Abstract :
Pt/Na/sup +/ ion conductive ceramics thin film/Pt/carbonate a/sub 2/CO/sub 3/:BaCO/sub 3/=1:1.7 mol) structure micro CO/sub 2/ sensors were prepared and their sensing properties were investigated. The thin film Na/sup +/ ion conductors formed by using RF magnetron sputtering technique. The chemical composition of thin film Nae6>/e6> ion conductor was found to be same as that of NASICON(x=2). The nernst slope of 57 mV/decade or CO/sub 2/ concentration range between 1,000 to 10,000 ppm was observed at the operating temperature of 400/spl deg/C.
Keywords :
carbon compounds; ceramics; gas sensors; ionic conductivity; metallic thin films; microsensors; platinum; sodium; sputtered coatings; 400 degC; CO/sub 2/; CO/sub 2/ concentration; MEMS; Pt-Na; Pt/Na/sup +/ ion conductive ceramics; RF magnetron sputtering technique; chemical composition; sensing properties; structure micro CO/sub 2/ sensors; thin film Na ion conductors; thin film micro carbon oxide sensor; thin film/Pt/carbonate; Ceramics; Chemical sensors; Conductive films; Gas detectors; Magnetic sensors; Micromechanical devices; Radio frequency; Sputtering; Temperature distribution; Thin film sensors;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215371
