MEMS-fabricated ICPE grippers for aqueous applications

Author

Zhou, J.W.L. ; Li, W.J.

Author_Institution

Center for Micro & Nano Syst., Chinese Univ. of Hong Kong, Shatin, China

Volume

1

fYear

2003

Firstpage

556

Abstract

This paper presents the results of our ongoing investigation of using Nafion solution to construct micron scale actuators as grippers for underwater manipulation. We have demonstrated MEMS-based fabrication of cantilever structures composed of Au/Nafion/Au film layers on silicon substrates is possible. The smallest actuators fabricated were 30 /spl mu/m wide, 300 /spl mu/m long and 0.4 /spl mu/m thick. We have shown that 2-finger actuators (each 100 /spl mu/m wide, 1200 /spl mu/m long and 0.4 /spl mu/m thick) could be fully actuated in water at /spl sim/7 V DC. In addition, we have found that micro Au/Nafion/Au cantilevers can respond to pH level changes in a solution environment, suggesting that they could potentially be used as biological sensors.

Keywords

biosensors; gold; microactuators; microsensors; pH; polymer electrolytes; polymer films; 0.4 micron; 100 micron; 1200 micron; 30 micron; 300 micron; 7 V; Au; Au/Nafion/Au film layers; MEMS; Nafion solution; Si; aqueous applications; biological sensors; cantilever structures; finger actuators; ionic conduction polymer film grippers; micro Au/Nafion/Au cantilevers; micron scale actuators; pH level; silicon substrates; water; Actuators; Chemical technology; Conducting materials; Fabrication; Grippers; Microactuators; Microinjection; Micromechanical devices; Polymer films; Robotics and automation;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215377

Filename

1215377