Title :
MEMS-fabricated ICPE grippers for aqueous applications
Author :
Zhou, J.W.L. ; Li, W.J.
Author_Institution :
Center for Micro & Nano Syst., Chinese Univ. of Hong Kong, Shatin, China
Abstract :
This paper presents the results of our ongoing investigation of using Nafion solution to construct micron scale actuators as grippers for underwater manipulation. We have demonstrated MEMS-based fabrication of cantilever structures composed of Au/Nafion/Au film layers on silicon substrates is possible. The smallest actuators fabricated were 30 /spl mu/m wide, 300 /spl mu/m long and 0.4 /spl mu/m thick. We have shown that 2-finger actuators (each 100 /spl mu/m wide, 1200 /spl mu/m long and 0.4 /spl mu/m thick) could be fully actuated in water at /spl sim/7 V DC. In addition, we have found that micro Au/Nafion/Au cantilevers can respond to pH level changes in a solution environment, suggesting that they could potentially be used as biological sensors.
Keywords :
biosensors; gold; microactuators; microsensors; pH; polymer electrolytes; polymer films; 0.4 micron; 100 micron; 1200 micron; 30 micron; 300 micron; 7 V; Au; Au/Nafion/Au film layers; MEMS; Nafion solution; Si; aqueous applications; biological sensors; cantilever structures; finger actuators; ionic conduction polymer film grippers; micro Au/Nafion/Au cantilevers; micron scale actuators; pH level; silicon substrates; water; Actuators; Chemical technology; Conducting materials; Fabrication; Grippers; Microactuators; Microinjection; Micromechanical devices; Polymer films; Robotics and automation;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215377
