DocumentCode :
1700048
Title :
Integrated polymer waveguides for absorbance detection in chemical analysis systems
Author :
Mogensen, K.B. ; El-Ali, J. ; Wolff, A. ; Kutter, J.P.
Author_Institution :
Microelek. Centre, Tech. Univ. of Denmark, Lyngby, Denmark
Volume :
1
fYear :
2003
Firstpage :
694
Abstract :
A chemical analysis system for absorbance detection with integrated polymer waveguides is reported for the first time. The fabrication procedure relies on structuring of a single layer of the photoresist SU-8, so both the microfluidic channel network and the optical components, which include planar waveguides and fiber-to-waveguide coupler structures, are defined in the same processing step. This results in self-alignment of all components and enables a fabrication and packaging time of only one day. The fabrication scheme has recently been presented elsewhere for fluorescence excitation of beads. The emphasis of this paper is on the signal-to-noise ratio of the detection and its relation to the sensitivity. Two absorbance cells with an optical path length of 100 /spl mu/m and 1000 /spl mu/m were characterized and compared in terms of sensitivity, limit of detection and effective path length for measurements of the dye Bromothymol Blue. The influence of three different bonding procedures on the spectrally resolved propagation loss of the integrated waveguides between 500 nm and 900 nm was furthermore determined.
Keywords :
dyes; fluorescence; integrated circuit packaging; microfluidics; optical fibre couplers; optical fibre losses; optical planar waveguides; photoresists; polymers; sensitivity; 100 micron; 1000 micron; 500 to 900 nm; absorbance cells; absorbance detection; bonding; chemical analysis systems; dye bromothymol blue; fiber-waveguide coupler structures; fluorescence excitation; integrated polymer waveguides; microfluidic channel network; optical components; optical path length; packaging time; photoresist SU-8; planar waveguides; sensitivity; signal-to-noise ratio; spectrally resolved propagation loss; Chemical analysis; Microfluidics; Optical device fabrication; Optical devices; Optical planar waveguides; Optical waveguide components; Optical waveguides; Planar waveguides; Polymers; Resists;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
Type :
conf
DOI :
10.1109/SENSOR.2003.1215568
Filename :
1215568
Link To Document :
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