Title :
Multi-walled carbon nanotube sensors
Author :
Chung, J. ; Lee, K.-H. ; Lee, J.
Author_Institution :
Mech. Eng. Dept., Northwestern Univ., Evanston, IL, USA
Abstract :
This paper presents experimental results that demonstrate the sensing capability of a multi-walled carbon nanotube (MWCNT). A MEMS-based fabrication process was developed to fabricate a device where a single MWCNT was precisely assembled across a gap. The device could be used either as a chemical-or a flow sensor depending on design and fabrication process. A MWCNT that experienced an electrical breakdown sensitively reacted to gaseous environment. A MWCNT suspended by the dry etching of substrate functioned as a physical sensor to detect N/sub 2/ gas flow. Device fabrication process is suitable to the mass production of CNT-based NEMS/MEMS devices.
Keywords :
carbon nanotubes; electric breakdown; gas sensors; microsensors; nitrogen; plasma materials processing; sputter etching; C; MEMS devices; MEMS-based fabrication; N/sub 2/; N/sub 2/ gas flow detection; chemical sensor; dry etching; electrical breakdown; flow sensor; mass production; multiwalled carbon nanotube sensors; nanoelectro mechanical system; physical sensor; sensing devices; Assembly; Carbon nanotubes; Chemical processes; Chemical sensors; Dry etching; Electric breakdown; Fabrication; Fluid flow; Gas detectors; Process design;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215574
