High resolution and high sensitivity CMOS panel sensors for X-ray imaging

Author

Mori, Harumichi ; Kyuushima, Ryuuji ; Fujita, Kazuki ; Honda, Masahiko

Author_Institution

Hamamatsu Photonics KK, Japan

Volume

1

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

29

Lastpage

33

Abstract

The CMOS panel sensors developed for detecting high quality, large area X-ray images. The purpose of this study was to assess the performance of the imager which has a diagonal size of 7 inches (non-tiled monolithic chip) and is made of monocrystalline silicon (optimized for use in digital radiography associated with two kind of thallium doped cesium iodide scintillators). The XM09D has 50 um pixels, a 2400 × 2400 pixel array (5,760,000 pixels) which features a resolution of 8 lp/mm with a single pixel drive. The XM08D has 100 um pixels, a 1248 × 1248 pixel array which delivers in a frame rate of 30 frames/sec which is achieved by means of a 4 × 4 binning readout. Both sensors utilize an FSP (flipped scintillator plate) made from high resolution, high luminance CsI crystals that are grown into a needle structure and coupled to a photodiode array for indirect detection of X-ray images

Keywords

CMOS analogue integrated circuits; X-ray detection; data acquisition; flip-chip devices; nuclear electronics; position sensitive particle detectors; readout electronics; silicon radiation detectors; solid scintillation detectors; 7 in; CMOS; CsI:Tl; FSP; Si; XM09D; acquisition methods; binning readout; digital radiography; flipped scintillator plate; high quality X-ray images; high resolution X-ray CMOS panel sensors; high resolution high luminance crystals; high sensitivity X-ray CMOS panel sensors; monocrystalline silicon; needle structure; nontiled monolithic chip; photodiode array; single pixel drive; thallium doped cesium iodide scintillators; CMOS image sensors; Image resolution; Image sensors; Log periodic antennas; Radiography; Sensor arrays; Silicon; X-ray detection; X-ray detectors; X-ray imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Nuclear Science Symposium Conference Record, 2001 IEEE

Conference_Location

San Diego, CA

ISSN

1082-3654

Print_ISBN

0-7803-7324-3

Type

conf

DOI

10.1109/NSSMIC.2001.1008403

Filename

1008403