Title :
Local growth of sol-gel films by means of microhotplates
Author :
Calame, F. ; Baborowski, J. ; Ledermann, N. ; Muralt, P.
Author_Institution :
Ceramics Lab., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
Abstract :
PZT (PbZr/sub x/Ti/sub 1-x/O/sub 3/) thin films have been locally grown by means of sol-gel deposition and local anneals on microhotplate. The microhotplate was based on a tantalum silicide filament (Ta/sub 5/Si/sub 3/) formed on stress compensated SiN/SiO/sub 2/ membrane. On this filament, a passivation layer of SiO/sub 2/, a layer of Ti/TiO/sub 2/ and a bottom electrode of Pt were deposited. Due to the low heat conductivity of the membrane, crystallization of the PZT film occurs exactly on the resistor filament. The formation of crystalline, i.e. perovskite PZT was verified by means of X-ray diffraction. A random PZT texture has been observed.
Keywords :
X-ray diffraction; annealing; crystallisation; electrochemical electrodes; heat conduction; internal stresses; lead compounds; membranes; passivation; piezoelectric materials; piezoelectric thin films; platinum; sol-gel processing; tantalum compounds; texture; PZT; PZT thin films; PbZrO3TiO3; Pt; Pt electrode; Ta/sub 5/Si/sub 3/; X-ray diffraction; annealing; crystallization; heat conductivity; microhotplates; passivation; resistor filament; sol-gel films; stress compensated SiN/SiO/sub 2/ membrane; tantalum silicide filament; texture; Annealing; Biomembranes; Conductivity; Crystallization; Electrodes; Passivation; Silicides; Silicon compounds; Sputtering; Stress;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215582
