DocumentCode
1700636
Title
Rapid, low-cost fabrication of parylene microchannels for microfluidic applications
Author
Hong-seok Noh ; Yoonsu Choi ; Chi-fu Wu ; Hesketh, P.J. ; Allen, M.G.
Author_Institution
Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Volume
1
fYear
2003
Firstpage
798
Abstract
This paper presents a rapid and low-cost fabrication method of parylene microchannels, so-called ´parylene micromolding´. Technical aspects of this new method are explored and some example products fabricated by this method are displayed. Among them, meander type channel, long spiral channel, electrophoretic channel, and dielectrophoretic channel are included.
Keywords
microfluidics; micromachining; moulding; polymers; dielectrophoretic channel; electrophoretic channel; long spiral channel; meander type channel; microfluidic applications; parylene microchannel fabrication; parylene micromolding; Application software; Bonding; Costs; Etching; Fabrication; Microchannel; Microfluidics; Micromachining; Resists; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7731-1
Type
conf
DOI
10.1109/SENSOR.2003.1215594
Filename
1215594
Link To Document