An isolated tunable capacitor with a linear capacitance-voltage behavior

Author

Tsai, C. ; Stupar, P.A. ; Borwick, R.L. ; Pai, M. ; DeNatale, J.

Author_Institution

Rockwell Sci. Co., Thousand Oaks, CA, USA

Volume

1

fYear

2003

Firstpage

833

Abstract

A unique tunable capacitor has been designed that facilitates a completely isolated capacitance and a truly linear capacitance-voltage behavior. Using a low-temperature adhesive bonding process and device layer transfer techniques, a linear analog tunable capacitor has been fabricated and tested. The device shows a linear capacitance-voltage behavior using a +-10 V input voltage and tunes over a 1.78 to 3.88 pf range. The isolated design also allows greater flexibility in circuit design because the capacitor is not required to be a capacitor to ground.

Keywords

adhesive bonding; capacitance; capacitors; electron device testing; linear network synthesis; -10 to 10 V; circuit design; device layer transfer; isolated capacitance; isolated tunable capacitor; linear analog tunable capacitor; linear capacitance-voltage; low-temperature adhesive bonding process; Capacitance; Capacitance-voltage characteristics; Drives; Electrostatic actuators; Isolation technology; Springs; Switched capacitor circuits; Tunable circuits and devices; Tuning; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215603

Filename

1215603