A hybrid approach to low-voltage MEMS switches

We have fabricated a hybrid MEMS switch that has improved mechanical performance over that of the traditional electrostatic switch. The hybrid switch uses the Lorentz force for actuation and electrostatics for the holding force. A short current pulse is passed along the suspension in the presence of a permanent magnetic field, thereby creating a lateral displacement. The displacement moves the micro-relay into contact and reduces the gap of the hold capacitors. Voltages as low as 1 V can be used to drive and hold the switch shut, without compromising contact force, hold force, restoring force, or response time. Additionally, the bi-directional nature of the Lorentz force allows for an active open of switches to counter contact adhesion. This approach offers additional design space for enhanced switch performance without compromising many of the desired qualities of a MEMS switch.