Title :
The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter
Author :
Bircumshaw, B. ; Liu, G. ; Takeuchi, H. ; Tsu-Jae King ; Howe, R. ; O´Reilly, O. ; Pisano, A.
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA, USA
Abstract :
This paper presents a new electrostatic RF MEMS resonator design: the radial bulk annular resonator (RBAR). The RBAR utilizes the bulk radial resonant modes of an annulus. The theory behind the RBAR, and its predecessor the bulk longitudinal resonator (BLR), will be developed and discussed. It is found that the RBAR is capable of achieving an arbitrarily low motional resistance for any desired resonant frequency at the cost of increased average annular radius. This feature makes the RBAR attractive for minimizing insertion loss in bandpass filters.
Keywords :
micromechanical resonators; resonator filters; RF MEMS filter; arbitrarily low motional resistance; electrostatic RF MEMS resonator design; insertion loss; radial bulk annular resonator; Electrostatics; Fabrication; Film bulk acoustic resonators; Micromechanical devices; Piezoelectric films; Radio frequency; Radiofrequency microelectromechanical systems; Resonant frequency; Resonator filters; Springs;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215614
