Chemical microsystem based on integration of microresonant sensor and CMOS ASIC

Author

Demirci, K.S. ; Truax, S. ; Beardslee, L.A. ; Brand, O.

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2009

Firstpage

515

Lastpage

518

Abstract

A silicon-based microsystem consisting of a mass-sensitive resonant sensor and a CMOS ASIC containing feedback circuitry is demonstrated for portable sensing applications. The feedback circuitry sustains oscillation of the resonant sensor at its mechanical resonance frequency ranging between 200 and 800 kHz. The microsystem has been used for detection of volatile organic compounds in the gas-phase, and a limit of detection of 13 ppm for toluene is obtained with a frequency stability of 16 mHz.

Keywords

CMOS integrated circuits; application specific integrated circuits; chemical sensors; circuit feedback; microsensors; organic compounds; silicon; CMOS ASIC; chemical microsystem; feedback circuitry; frequency 200 kHz to 800 kHz; microresonant sensor; toluene; volatile organic compounds; Application specific integrated circuits; Chemical sensors; Circuit stability; Feedback circuits; Gas detectors; Mechanical sensors; RLC circuits; Resonance; Resonant frequency; Volatile organic compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Custom Integrated Circuits Conference, 2009. CICC '09. IEEE

Conference_Location

San Jose, CA

Print_ISBN

978-1-4244-4071-9

Electronic_ISBN

978-1-4244-4073-3

Type

conf

DOI

10.1109/CICC.2009.5280797

Filename

5280797