Title :
Tapping-mode HF nanometric lateral gap resonators: experimental and theory
Author :
Quevy, E. ; Legrand, B. ; Collard, D. ; Buchaillot, L.
Author_Institution :
Dept. ISEN Cite Sci., Silicon Microsyst. Group., Villeneuve d´Ascq, France
Abstract :
We report in this paper on the use of micromechanical resonators in tapping-mode for HF frequencies. Resonators involved are clamped-clamped beams with nanometer-scale lateral gap for symmetric capacitive transducers. Under tapping-mode actuation, square shape transmission curves are obtained with several tenth of kHz bandwidth and natural resonance frequency up to 35 MHz. The behavior is fully analyzed through contact modeling, considering that application of such devices is promising in mechanically controlled stable and autonomous oscillators and sensors, avoiding the use of any expensive additional control loops electronics.
Keywords :
mechanical contact; micromechanical resonators; transducers; 35 MHz; clamped-clamped beams; contact modeling; mechanically controlled oscillators; mechanically controlled sensors; micromechanical resonators; symmetric capacitive transducers; tapping-mode HF nanometric lateral gap resonators; tapping-mode actuation; Bandwidth; Electrodes; Hip; Micromechanical devices; Oscillators; Resonance; Resonant frequency; Shape control; Silicon; Transducers;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215615
