Title :
MEMS switches and other RF components fabricated using CMOS postprocess compatible surface micromachining
Author :
Ericsson, P. ; Hedstrom, M. ; Olsson, A. ; Scholes, A. ; Svennebrink, J. ; Vieider, C. ; Wenk, B.
Author_Institution :
Acreo AB, Kista, Sweden
Abstract :
This paper reports the development of dielectric membrane based RF MEMS switches, capacitors and inductors fabricated using CMOS postprocess compatible surface micromachining. The process allows implementation of a large number of different designs with only small changes in the process sequence. Initial tests of fabricated switches show promising results.
Keywords :
capacitors; inductors; micromachining; microswitches; CMOS postprocess; RF MEMS capacitors; RF MEMS inductors; RF MEMS switches; RF components; dielectric membrane; surface micromachining; Biomembranes; Capacitors; Dielectrics; Inductors; Micromachining; Microswitches; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Testing;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215619
