Title :
Prospects of application of mathematical simulation in scanning electron microscopy
Author :
Aristov, V.V. ; Dryomova, N.N. ; Zaitsev, S.I. ; Kazmiruk, V.V. ; Ushakov, N.G. ; Firsova, A.A.
Author_Institution :
Institute of Problems of Microelectronics Technology and SuperpuTe Materials
Abstract :
Thus, submicron electron-beam diagnostics calls for construction of physical and mathematical models of signal generation, on the one hand, and development of efficient signal processing techniques, on the other hand. Mathematical simulation is one of the most essential means of solving these problems. The paper reports the results of application of the mathematical simulation method to solving the two problems of scanning electron microscopy. The possibility of its employment in submicron diagnostics is considered.
Keywords :
Electron emission; Materials science and technology; Microelectronics; Particle scattering; Probes; Scanning electron microscopy; Signal generators; Signal processing; Size measurement; X-ray scattering;
Conference_Titel :
Numerical Analysis of Semiconductor Devices and Integrated Circuits, 1987. NASECODE V. Proceedings of the Fifth International Conference on the
Conference_Location :
Dublin, Ireland
Print_ISBN :
0-906783-72-0
DOI :
10.1109/NASCOD.1987.721129
