Title :
PhC structures for optoelectronics
Author :
Pudis, D. ; Lettrichova, Ivana ; Jandura, D. ; Suslik, L. ; Gaso, P. ; Martincek, Ivan ; Skriniarova, J. ; Kovac, J. ; Novak, Jiri
Author_Institution :
Dept. of Phys., Univ. of Zilina, Zilina, Slovakia
Abstract :
In this paper we present optical technologies, which can be applicable for fabrication of planar photonic crystals (PhCs). We focus on basic description of interference and near-field scanning optical microscope lithography and direct laser writing process. We also show possibilities and results obtained by application of PhC on light emitting diode surface and their emission properties.
Keywords :
integrated optics; integrated optoelectronics; laser materials processing; light emitting diodes; light interference; optical fabrication; photolithography; photonic crystals; PhC Structures; direct laser writing; emission properties; interference; light emitting diode; near-field scanning optical microscope lithography; optoelectronics; planar photonic crystals; Light emitting diodes; Mirrors; Optical variables measurement; Photonics; Resists; Semiconductor lasers; Surface treatment; NSOM lithography; interference lithography; light emitting diode; photonic structure;
Conference_Titel :
ELEKTRO, 2014
Conference_Location :
Rajecke Teplice
Print_ISBN :
978-1-4799-3720-2
DOI :
10.1109/ELEKTRO.2014.6847861
