Title :
Interactive process simulation program for analysis and synthesis
Author :
Koltai, M. ; Trutz, S.
Author_Institution :
Technical University Budapest
Abstract :
Interactive process simulation program called MICRO-APT has been extended with an algorithm, predicting process parameters in order to get a specified structure. This algorithm can be considered as a process parameter synthesis procedure as opposed to the usual analysis with a given set of parameters. Description of the algorithm and examples are given in the paper.
Keywords :
Algorithm design and analysis; Analytical models; Conductivity; Impurities; Microelectronics; Oxidation; Prediction algorithms; Predictive models; Silicon; Threshold voltage;
Conference_Titel :
Numerical Analysis of Semiconductor Devices and Integrated Circuits, 1987. NASECODE V. Proceedings of the Fifth International Conference on the
Conference_Location :
Dublin, Ireland
Print_ISBN :
0-906783-72-0
DOI :
10.1109/NASCOD.1987.721190
