DocumentCode
1702638
Title
MEMS on/off and 1×2 optical switch with integrated fiber alignment capability
Author
Leow, Cheah Wei ; Mohammad, A.B.
Author_Institution
Fakulti Kejuruteraan Elektrik, Univ. Teknologi Malaysia, Johor, Malaysia
fYear
2004
Abstract
An on/off free space optical switch is described in this paper. The device consists of intersecting cantilevers and is electrostatically actuated. A fiber is put onto the cantilevers and by controlling the position of the fiber through actuation, switching operation can be achieved. The device is also suitable for in-package fiber alignment application, where the cantilevers can be used as passive or active fiber alignment microstructure.
Keywords
cantilevers; microswitches; optical switches; MEMS on/off switch; electrostatically actuated device; free space optical switch; in-package fiber alignment; integrated fiber alignment; intersecting cantilevers; Assembly; Communication switching; Gold; Micromechanical devices; Microstructure; Optical fiber communication; Optical fiber devices; Optical fiber testing; Optical switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN
0-7803-8658-2
Type
conf
DOI
10.1109/SMELEC.2004.1620863
Filename
1620863
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