Title :
MEMS on/off and 1×2 optical switch with integrated fiber alignment capability
Author :
Leow, Cheah Wei ; Mohammad, A.B.
Author_Institution :
Fakulti Kejuruteraan Elektrik, Univ. Teknologi Malaysia, Johor, Malaysia
Abstract :
An on/off free space optical switch is described in this paper. The device consists of intersecting cantilevers and is electrostatically actuated. A fiber is put onto the cantilevers and by controlling the position of the fiber through actuation, switching operation can be achieved. The device is also suitable for in-package fiber alignment application, where the cantilevers can be used as passive or active fiber alignment microstructure.
Keywords :
cantilevers; microswitches; optical switches; MEMS on/off switch; electrostatically actuated device; free space optical switch; in-package fiber alignment; integrated fiber alignment; intersecting cantilevers; Assembly; Communication switching; Gold; Micromechanical devices; Microstructure; Optical fiber communication; Optical fiber devices; Optical fiber testing; Optical switches; Voltage;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620863
