Microengineering technologies and capabilities

The various silicon-based technologies applicable to microengineering are reviewed and their limitations with regard to 3-dimensional fabrication are discussed. The reasons for needing a 3-dimensional microengineering technique are then discussed and the current capability of existing non-silicon processes for satisfying this need are examined. A technique, selective anodisation, is then presented which enables the fabrication of true 3-dimensional microstructures and devices while maintaining the benefits of silicon processing