Title :
Traceability for on-wafer CPW S-parameter measurements
Author :
Bannister, D.J. ; Smith, D.I.
Author_Institution :
NPL, Teddington, UK
fDate :
10/19/1993 12:00:00 AM
Abstract :
Formal quality systems such as the ISO 9000/BS 5750 series standards have created a growing requirement for electrical measurements to be traceable to nationally and internationally certified units such as the SI ohm, watt, and metre. For on-wafer scattering parameter measurement, results are referenced back to fundamental standards via the on-wafer impedance standards used in automatic network analyser (ANA) calibration. This paper describes work at the National Physical Laboratory towards the production of coplanar waveguide (CPW) calibration standards of certified quality on GaAs substrates
Keywords :
III-V semiconductors; MMIC; S-parameters; integrated circuit testing; measurement standards; microstrip lines; microwave measurement; network analysers; GaAs; ISO 9000/BS 5750 series standards; National Physical Laboratory; automatic network analyser; certified units; electrical measurements; on-wafer CPW S-parameter measurements; on-wafer impedance standards;
Conference_Titel :
Analysis, Design and Applications of Coplanar Waveguides, IEE Colloquium on
Conference_Location :
London
